{"id":72,"date":"2022-01-04T12:37:19","date_gmt":"2022-01-04T04:37:19","guid":{"rendered":"https:\/\/www.eee.hku.hk\/microLED\/?p=72"},"modified":"2022-01-04T17:43:58","modified_gmt":"2022-01-04T09:43:58","slug":"fabrication-and-performance-of-parallel-addressed-ingan-micro-led-arrays","status":"publish","type":"post","link":"https:\/\/www.eee.hku.hk\/microLED\/fabrication-and-performance-of-parallel-addressed-ingan-micro-led-arrays\/","title":{"rendered":"Fabrication and performance of parallel-addressed InGaN micro-LED arrays"},"content":{"rendered":"\n<p class=\"has-text-align-right wp-block-paragraph\">&#8211; <em>H.W. Choi, C.W. Jeon, M.D. Dawson, P.R. Edwards, and R.W. Martin<\/em><\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1019\" height=\"874\" src=\"https:\/\/www.eee.hku.hk\/microLED\/wp-content\/uploads\/2022\/01\/2003_IEEEPTL_15_4_510_Image.png\" alt=\"\" class=\"wp-image-73\" srcset=\"https:\/\/www.eee.hku.hk\/microLED\/wp-content\/uploads\/2022\/01\/2003_IEEEPTL_15_4_510_Image.png 1019w, https:\/\/www.eee.hku.hk\/microLED\/wp-content\/uploads\/2022\/01\/2003_IEEEPTL_15_4_510_Image-300x257.png 300w, https:\/\/www.eee.hku.hk\/microLED\/wp-content\/uploads\/2022\/01\/2003_IEEEPTL_15_4_510_Image-768x659.png 768w, https:\/\/www.eee.hku.hk\/microLED\/wp-content\/uploads\/2022\/01\/2003_IEEEPTL_15_4_510_Image-350x300.png 350w\" sizes=\"auto, (max-width: 1019px) 100vw, 1019px\" \/><figcaption>Optical microscope images of operating arrays of (a) 8-\u00b5m, (b) 12-\u00b5m and (c) 20-\u00b5m element diameter, and (d) optical image of cathodoluminescence under broad-beam excitation of a cluster of four 12-\u00b5m micro-LED elements<\/figcaption><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>IEEE Photonics Technology Letters, vol. 15, 4, pp. 510-512 (2003).<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">High-performance, two-dimensional arrays of parallel-addressed InGaN blue micro-light-emitting diodes (LEDs) with individual element diameters of 8, 12, and 20 \u03bcm, respectively, and overall dimensions 490 \u00d7490 \u03bcm, have been fabricated. In order to overcome the difficulty of interconnecting multiple device elements with sufficient step-height coverage for contact metallization, a novel scheme involving the etching of sloped-sidewalls has been developed. The devices have current-voltage (I-V) characteristics approaching those of broad-area reference LEDs fabricated from the same wafer, and give comparable (3-mW) light output in the forward direction to the reference LEDs, despite much lower active area. The external efficiencies of the micro-LED arrays improve as the dimensions of the individual elements are scaled down. This is attributed to scattering at the etched sidewalls of in-plane propagating photons into the forward direction.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">DOI: <a href=\"https:\/\/doi.org\/10.1109\/LPT.2003.809257\" data-type=\"URL\" data-id=\"https:\/\/doi.org\/10.1109\/LPT.2003.809257\">10.1109\/LPT.2003.809257<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>&#8211; H.W. Choi, C.W. Jeon, M.D. Dawson, P.R. Edwards, and R.W. Martin IEEE Photonics Technology Letters, vol. 15, 4, pp. 510-512 (2003). High-performance, two-dimensional arrays&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[5,4,8],"class_list":["post-72","post","type-post","status-publish","format-standard","hentry","category-publications","tag-display","tag-microled","tag-monolithic"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/posts\/72","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/comments?post=72"}],"version-history":[{"count":3,"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/posts\/72\/revisions"}],"predecessor-version":[{"id":80,"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/posts\/72\/revisions\/80"}],"wp:attachment":[{"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/media?parent=72"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/categories?post=72"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.eee.hku.hk\/microLED\/wp-json\/wp\/v2\/tags?post=72"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}