%PDF-1.6
%
355 0 obj
<>
endobj
356 0 obj
<>
endobj
357 0 obj
<>
endobj
13 0 obj
<>stream
Acrobat Distiller 7.0 for Macintosh
2010-04-01T10:45:22+08:00
LaTeX with hyperref package
2010-03-30T17:45:23+05:30
2010-04-01T10:45:22+08:00
application/pdf
Ningning Jia, Edmund Y Lam
Machine learning for inverse lithography: using stochastic gradient descent for robust photomask synthesis
uuid:ee53737e-3bf5-11df-8ca2-0016cba91303
uuid:21b57a55-fb7c-42d5-976f-5b1bf7769570
endstream
endobj
402 0 obj
<>/Encoding<>>>>>
endobj
17 0 obj
<>
endobj
350 0 obj
<>
endobj
244 0 obj
<>stream
HWѱ 'ܟ؏U>$@
9Gal"mp8g4
*DJ@fk$VE7F
r
.>U!VeHߵD'=>
OܱuF"6#х"&Vr-"XcYkɔ;aJHmy7c6:K
G$QrORXDٻS3E,մps+㩏}#